Hydrogen etching tool and method for silicon carbide wafer

• Main Authors: WANG CHUANYONG, SHENG YONGJIANG, OUYANG PENGGEN, WU YAOYAO, TANG YONGGANG, HUANG JUN, HU JIANRONG
• Format: Patent
• Language: Chinese; English
• Published: 06.06.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention provides a silicon carbide wafer hydrogen etching tool and method, and belongs to the technical field of silicon carbide wafer hydrogen etching, and the silicon carbide wafer hydrogen etching tool comprises a shell and an etching assembly located in the shell. The etching assembly comp...