IGBT chip and manufacturing device thereof

The invention discloses an IGBT chip and a manufacturing device thereof, and relates to the technical field of chip manufacturing devices.The IGBT chip comprises a base, a fixing plate is rotationally installed on the upper surface of the base, a first conveying table is fixedly installed on the sid...

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Bibliographic Details
Main Authors PING ZHENHUA, ZHANG JUFANG
Format Patent
LanguageChinese
English
Published 23.05.2023
Subjects
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