Anomaly detection from aggregation statistics using neural networks

• Main Authors: ISKANDER JIMMY, ARMACOST MICHAEL D
• Format: Patent
• Language: Chinese; English
• Published: 16.05.2023
• Subjects: CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PHYSICS; REGULATING

The disclosed embodiments describe a method and system to perform a method of obtaining a simplified representation of a plurality of sensor statistics representative of data collected by a plurality of sensors associated with a device manufacturing system that performs manufacturing operations. The...