Large-view-field high-resolution defect degree detection device and method

• Main Authors: ZHAO ZHIDONG, CHEN CHUQIAO, WANG HONGKUI, ZHU ZUNJIE, ZHANG JIYONG, LYU BINBIN, ZHANG ZHUORAN, YIN HAIBING, GAO YUHAN, SUN YAOQI, WANG RUIHAI, WANG TINGYU, LI ZONGPENG, HU JI, YAN CHENGGANG
• Format: Patent
• Language: Chinese; English
• Published: 21.04.2023
• Subjects: CALCULATING; COMPUTING; COUNTING; ELECTRIC DIGITAL DATA PROCESSING; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; PHYSICS

The invention discloses a large-field-of-view high-resolution defect degree detection device and a large-field-of-view high-resolution defect degree detection method. The device comprises a laser light source, a tube lens, an x-y two-dimensional sample scanner, a diffuser, an objective lens, a photographic lens and a CCD (Charge Coupled Device) camera which are arranged in sequence, wherein the focusing position of the detection device is coplanar with the rear surface of the x-y two-dimensional sample scanner. The device disclosed by the invention is suitable for a transmission-type illumination sample, and can realize large-view-field, accurate and high-quality sample defect detection before a plurality of images, modulated by the diffuser, of the observation sample are collected by the scanning device to recover super-resolution emergent waves of the sample. The device provided by the invention gives consideration to both large-view-field and high-resolution imaging. 本发明公开了一种大视场高分辨率缺陷度检测装置及方法；装置包括依次设置的激光光源