Semiconductor wafer cleaning manipulator

• Main Author: CAI YAOYU
• Format: Patent
• Language: Chinese; English
• Published: 07.04.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CLEANING; CLEANING IN GENERAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PERFORMING OPERATIONS; PREVENTION OF FOULING IN GENERAL; SEMICONDUCTOR DEVICES; TRANSPORTING

The invention discloses a semiconductor wafer cleaning manipulator, and relates to the field of manipulators, the semiconductor wafer cleaning manipulator comprises a workbench, the two ends of the top surface of the workbench are respectively provided with a group of cleaning grooves, and the middle section of the top end of the workbench is rotatably connected with two rotating columns matched with the two groups of cleaning grooves respectively. When a first residual gear and a second residual gear rotate, part of residual teeth of the first residual gear drive a third full gear to rotate clockwise, so that a threaded sleeve rotates to be matched with a threaded column to push a lifting net to ascend, and a flower basket is separated from a cleaning tank; and when the clamping jaw moves the flower basket to the position above the next-stage cleaning tank, the other part of residual teeth of the first residual gear and the second residual gear drive the lifting net again to repeat the lifting process once,