On-chip spiral magnetic core inductor and manufacturing method and batch production method thereof

• Main Authors: ZHANG TAO, CHEN CHAOHUI, PENG CHONGMEI, WANG HAORAN
• Format: Patent
• Language: Chinese; English
• Published: 29.11.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INDUCTANCES; MAGNETS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES; SEMICONDUCTOR DEVICES; TRANSFORMERS

The invention discloses an on-chip spiral magnetic core inductor and a manufacturing method and a batch production method thereof. The manufacturing method comprises the following steps: forming a groove structure on a first substrate; forming a magnetic core composite structure; and electrically connecting the groove structure with the magnetic core composite structure. According to the scheme, the groove structure is independently prepared on the first substrate, then the magnetic core composite structure incompatible with the CMOS technology is independently prepared, and finally the groove structure and the magnetic core composite structure on the first substrate are aligned through the packaging technology capable of being produced in batches for electrical interconnection. Not only is the problem of process compatibility solved, but also batch production of the on-chip spiral magnetic core inductor is realized, and the performance of the device is improved. 本申请公开了一种片上螺旋磁芯电感器及其制作方法和批量化生产方法，所述制作方法包括：在第一衬底