Illumination adjusting device and detection system

The invention relates to the technical field of semiconductor detection, and provides an illumination adjusting device and a detection system.The illumination adjusting device comprises a plurality of induction sets, a position sensor, an actuator, a light intensity detector and an adjusting process...

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Bibliographic Details
Main Authors CAO KUIKANG, LU ZHIJUAN, LUO CONG, YANG PENG, GU XIAODONG
Format Patent
LanguageChinese
English
Published 25.10.2022
Subjects
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