Illumination adjusting device and detection system
The invention relates to the technical field of semiconductor detection, and provides an illumination adjusting device and a detection system.The illumination adjusting device comprises a plurality of induction sets, a position sensor, an actuator, a light intensity detector and an adjusting process...
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Main Authors | , , , , |
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Format | Patent |
Language | Chinese English |
Published |
25.10.2022
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Subjects | |
Online Access | Get full text |
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