Illumination adjusting device and detection system

• Main Authors: CAO KUIKANG, LU ZHIJUAN, LUO CONG, YANG PENG, GU XIAODONG
• Format: Patent
• Language: Chinese; English
• Published: 25.10.2022
• Subjects: BASIC ELECTRIC ELEMENTS; CONTROLLING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PHYSICS; REGULATING; SEMICONDUCTOR DEVICES; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES

The invention relates to the technical field of semiconductor detection, and provides an illumination adjusting device and a detection system.The illumination adjusting device comprises a plurality of induction sets, a position sensor, an actuator, a light intensity detector and an adjusting processor; the induction group comprises a cross rod, a vertical rod and an induction deformation end; the light intensity detector is used for detecting and sensing the light intensity radiated by the deformation end; the position of the induction group is driven according to the shape change of the induction deformation end and the position change of the induction group; the detection system comprises a multi-wavelength laser module, a measurement illumination module, a vortex reference module, a focusing optical module, an image acquisition module, a data processing module, an external output module and a light intensity adjustment module. The illumination adjusting device is simple in structure, each sensing group is