Preparation method of curved surface diamond tritium titanium target with micro-channel structure

• Main Authors: LIU JINLONG, WEI JUNJUN, LI CHENGMING, HUANG YABO, ZHENG YUTING, HUANG KE, MA JINBIAO, YE SHENG, CAO SHUQIN, CHEN LIANGXIAN, OUYANG XIAOPING
• Format: Patent
• Language: Chinese; English
• Published: 30.09.2022
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; CONVERSION OF CHEMICAL ELEMENTS; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; NUCLEAR ENGINEERING; NUCLEAR PHYSICS; PHYSICS; RADIOACTIVE SOURCES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention relates to a preparation method of a curved surface diamond tritium titanium target with a micro-channel structure, and belongs to the technical field of nuclear technology application. The preparation method comprises the following steps: firstly, preparing a high-thermal-conductivity curved-surface diamond film by adopting direct-current arc plasma chemical vapor deposition (DC arc plasma CVD); grinding the growth surface and the nucleation surface of the curved-surface diamond film by adopting a curved-surface grinding machine; micro-channel processing is carried out on the nucleation surface of the diamond film through a laser; the machined curved-surface diamond film is subjected to acid pickling to remove graphite generated by laser machining; and finally, plating a tritium absorption metal layer with the thickness of 1-10 microns on the growth surface of the curved-surface diamond film through multifunctional magnetron sputtering equipment so as to obtain the curved-surface diamond tritiu