一种兼具减小发散角与散热的垂直腔面发射激光器

• Format: Patent
• Language: Chinese
• Published: 04.03.2025
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES USING STIMULATED EMISSION; ELECTRICITY

一种兼具减小发散角与散热的垂直腔面发射激光器，属于半导体光电子领域。所述激光器包括：n型电极，GaAs衬底，n型布拉格反射镜，n-间隔层，量子阱结构，p-间隔层，p型布拉格反射镜，位于p型布拉格反射镜底部的氧化限制层，隔离层，p型电极，散热机构。本发明设置散热机构，散热机构制备在发光区内，或制备在发光区外，或同时制备在发光区内和发光区外。通过合理设计能够得到器件内部不同的温度差异分布，温差导致材料的折射率差发生变化，得到不同的波导效应，能够得到发散角更小的器件，同时器件的热性能得到明显改善。本发明解决了制备VCSEL过程中，刻蚀上DBR层对器件可靠性造成影响的问题，也解决了大功率VCSEL的散热问题。 The invention discloses a vertical cavity surface emitting laser capable of reducing a divergence angle and dissipating heat, and belongs to the field of semiconductor photoelectrons. The laser comprises an n-type electrode, a GaAs substrate, an n-type Bragg reflector, an n-spacer layer, a quantum well structure, a p-spacer layer, a p-type Bragg reflector, an oxidation limiting layer located at the bottom of the p-type Bragg reflector, an isolation layer, a p-type electrode and a heat dissipation mechanism. The LED lamp is provided with the heat dissipation mechanism, and the heat dissipation mechanism is prepared in the light-emitting area or prepared outside the light-emitting area, or prepared in the light-