Rigid-flexible fused capacitive flexible MEMS ultrasonic transducer and preparation method thereof

• Main Authors: ZHAO LIBO, MA QI, ZHAO YIHE, LI ZIXUAN, YUAN JIAWEI, LI ZHIKANG, SHI XUAN, JI TIAN, QIN SHAOHUI, JIANG ZHUANGDE
• Format: Patent
• Language: Chinese; English
• Published: 29.04.2022
• Subjects: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; TRANSPORTING

The invention discloses a rigid-flexible fused capacitive flexible MEMS ultrasonic transducer and a preparation method thereof. A vibration film and a lower electrode of the transducer are made of rigid materials; the base and the supporting columns are made of flexible materials. The vibration film and the lower electrode are provided with grooves in areas corresponding to the surface of the pillar, and penetrate through the thickness directions of the vibration film and the lower electrode. According to the MEMS ultrasonic transducer, high resonant frequency is ensured by utilizing the rigid vibration film, and flexible design of the frequency of the MEMS ultrasonic transducer is realized; the flexibility of the MEMS ultrasonic transducer is realized by utilizing the flexible substrate and the supporting column, and the problem that the sensor frequency and the flexible design are mutually restricted is solved; a two-stage series vibration system is formed by the flexible supporting columns and the rigid th