Photoresist defoaming device and use method thereof

• Main Authors: FENG YANAN, LIU SONGJUN, SUN WEI, LYU GUOWEN, KONG XING, GUO SHUANGHUAN, JIA CHENGLIN
• Format: Patent
• Language: Chinese; English
• Published: 15.04.2022
• Subjects: PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SEPARATION; TRANSPORTING

The invention discloses a photoresist defoaming device and a using method thereof.The photoresist defoaming device comprises a defoaming tank, the defoaming tank comprises a top seat welded to the inner wall and a bubble breaking assembly arranged below the top seat, the bubble breaking assembly comprises a connecting rod, a seat block and a bubble breaking plate welded to the bottom wall of the seat block, the connecting rod is rotationally connected with the top seat through a hinge, and the connecting rod is rotationally connected with the top seat through a hinge; and an air cylinder is arranged on the bottom wall of the top base, the bubble breaking plate is rotationally connected with a connecting rod through a hinge, and a pressing plate is installed on the side wall of the connecting rod. According to the photoresist bubble removing device and the use method thereof, the AI camera and the bubble breaking assembly are arranged, in the photoresist bubble removing work, the AI camera shoots and monitors