Semiconductor differential pressure measuring device

• Main Authors: WATANABE TETSUYA, FUKUHARA SATOSHI, IKEDA KYOICHI
• Format: Patent
• Language: English
• Published: 22.01.1997
• Edition: 6
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

This is a semiconductor differential pressure measuring device comprising two measurement diaphragms and two detection sensors provided in a semiconductor substrate using micromachining techniques, and a computing circuit which computes the differences between these two sensor outputs: for each of t...