PIEZOELECTRIC ACTUATOR AND MICROFLUIDIC DEVICE
The present invention relates to a piezoelectric actuator and to a microfluidic device, such as a microvalve or micropump. The piezoelectric actuator (100) comprises a deflectable actuator membrane (102), and at least one piezoelectric element (104 A, B) operable to perform expansion and contraction...
Saved in:
Main Authors | , , , , , |
---|---|
Format | Patent |
Language | Chinese English |
Published |
01.02.2022
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Be the first to leave a comment!