PIEZOELECTRIC ACTUATOR AND MICROFLUIDIC DEVICE

The present invention relates to a piezoelectric actuator and to a microfluidic device, such as a microvalve or micropump. The piezoelectric actuator (100) comprises a deflectable actuator membrane (102), and at least one piezoelectric element (104 A, B) operable to perform expansion and contraction...

Full description

Saved in:
Bibliographic Details
Main Authors BHAT KASHEKODI ANJAN, WOIAS PETER, SHABANIAN ARDAVAN, STORK DAVID, GOLDSCHMIDTBOING FRANK, STORK HANS RAINER
Format Patent
LanguageChinese
English
Published 01.02.2022
Subjects
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
Online AccessGet full text

Cover

Be the first to leave a comment!
You must be logged in first