PIEZOELECTRIC ACTUATOR AND MICROFLUIDIC DEVICE

• Main Authors: BHAT KASHEKODI ANJAN, WOIAS PETER, SHABANIAN ARDAVAN, STORK DAVID, GOLDSCHMIDTBOING FRANK, STORK HANS RAINER
• Format: Patent
• Language: Chinese; English
• Published: 01.02.2022
• Subjects: CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION

The present invention relates to a piezoelectric actuator and to a microfluidic device, such as a microvalve or micropump. The piezoelectric actuator (100) comprises a deflectable actuator membrane (102), and at least one piezoelectric element (104 A, B) operable to perform expansion and contraction motion (106) depending on an electric field applied to the piezoelectric element, wherein the piezoelectric element is attached to a part of the actuator membrane for exerting mechanical force on the membrane. According to the present disclosure, the piezoelectric element leaves open a central region of the membrane and has a peripheral outline that does not coincide with an outline of the actuator membrane. 本发明涉及压电致动器以及涉及微流体设备，诸如微型阀或微型泵。压电致动器(100)包括可挠曲的致动器膜(102)以及至少一个压电元件(104A，104B)，至少一个压电元件可操作用于根据施加到压电元件的电场进行膨胀和收缩运动(106)，其中，压电元件附接到致动器膜的一部分，以用于对膜施加机械力。根据本发明，压电元件使膜的中心区域敞开并且具有与致动器膜的轮廓不一致的外围轮廓。