Automatic test system and method for silicon optical chip, electronic equipment and storage medium

• Main Author: LU KAICHEN
• Format: Patent
• Language: Chinese; English
• Published: 21.01.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

The invention discloses an automatic test system and method for a silicon optical chip, electronic equipment and a storage medium. The automatic test system for the silicon optical chip comprises a source measurement module, a probe card, an optical coupling module, a moving assembly and a control module; the control module is used for outputting a driving signal to the moving assembly, so that the moving assembly moves a silicon optical chip to be tested to a test station, and the probe card is moved to be connected with the silicon optical chip to be tested on the test station, and the optical coupling module is moved to enable the optical coupling module to be in coupling connection with the silicon optical chip to be tested; the control module is also used for receiving the electric signal measurement data sent by the source measurement module and the optical signal measurement data sent by the optical coupling module, and outputting a test report according to the electric signal measurement data and the