DETECTOR FOR PROCESS KIT RING WEAR

• Main Authors: CRIMINALE PHILLIP A, VISHWANATH YOGANANDA SARODE
• Format: Patent
• Language: Chinese; English
• Published: 18.01.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

A diagnostic disc includes a disc body having a sidewall around a circumference of the disc body and at least one protrusion extending outwardly from a top of the sidewall. A non-contact sensor is attached to an underside of each of the at least one protrusion. A a printed circuit board (PCB) is pos...