Method of making integrated thermoelectric converter and integrated thermoelectric converter obtained thereby

• Main Authors: LUCA SEGHIZZI, VILLA FLAVIO FRANCESCO, SCOLARI MARTINA, ZANOTTI LUCA, FERRARI PAOLO, ZULLINO LUCIA, MURARI BRUNO, NOMELLINI ANDREA
• Format: Patent
• Language: Chinese; English
• Published: 07.12.2021
• Subjects: ELECTRICITY

Embodiments of the present disclosure relate to a method of making an integrated thermoelectric converter and an integrated thermoelectric converter obtained thereby. The method includes providing a silicon-based material layer having a first surface and a second surface opposite the first surface and spaced apart from the first surface by a thickness of the silicon-based material layer; forming a plurality of first thermoelectric active elements of a first thermoelectric semiconductor material having a first Seebeck coefficient, and forming a plurality of second thermoelectric active elements of a second thermoelectric semiconductor material having a second Seebeck coefficient, wherein the first and second thermoelectric active elements are formed to extend from the first surface through the thickness of the silicon-based material layer to the second surface; forming conductive interconnects corresponding to the first and second surfaces of the silicon-based material layer, and forming input and output elect