Performance evaluation method for cleaning organic pollutants by low-pressure oxygen plasma

• Main Authors: LYU HAIBING, YUAN XIAODONG, MIAO XINXIANG, NIU LONGFEI, YANG MIN, LIU HAO, JIANG YILAN, LI YUHAI
• Format: Patent
• Language: Chinese; English
• Published: 16.11.2021
• Subjects: CLEANING; CLEANING IN GENERAL; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PERFORMING OPERATIONS; PHYSICS; PREVENTION OF FOULING IN GENERAL; TESTING; TRANSPORTING

The invention discloses a performance evaluation method for cleaning organic pollutants by using low-pressure oxygen plasma. The method comprises the following steps: acquiring the spatial concentration of specific hydrocarbon organic pollutants by using peak transmittance; rewriting the determined equivalent concentration of the specific hydrocarbon organic pollutants according to the number of hydrogen atoms distributed according to the number of carbon atoms; constructing the evaluation coefficient by the chemical reaction constant, the active oxygen atom space concentration and the number of hydrogen atoms distributed according to the number of carbon atoms and determined through fitting. According to the method, the evaluation coefficient of the low-pressure oxygen plasma is obtained by using the hydrocarbon pollutant equivalent space concentration based on transmittance test, and the method can be used for evaluating the cleaning performance of the low-pressure oxygen plasma in different states on speci