Stage system for worktable system
The invention relates to a stage system for a worktable system. In accordance with the invention, a plurality of air bearing devices is provided. Each air bearing device comprises: - an air bearing body, which has a free surface, - a primary channel which extends through the air bearing body and has...
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Main Authors | , , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
08.10.2021
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Subjects | |
Online Access | Get full text |
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