Stage system for worktable system

• Main Authors: OVERSCHIE PETER, TROMP SIEGFRIED ALEXANDER, SCHOLTEN BERT D, VAN DAM TEUNIS, SPAAN-BURKE THERESA MARY, DONDERS SJOERD NICOLAAS LAMBERTUS, JANSSENS STEF MARTEN JOHAN
• Format: Patent
• Language: Chinese; English
• Published: 08.10.2021
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES

The invention relates to a stage system for a worktable system. In accordance with the invention, a plurality of air bearing devices is provided. Each air bearing device comprises: - an air bearing body, which has a free surface, - a primary channel which extends through the air bearing body and has an inlet opening in the free surface, - a secondary channel system which extends through the air bearing body and which has a plurality of discharge openings in the free surface. The flow resistance in the secondary channel system is higher than the flow resistance in the primary channel. 本发明涉及一种用于工作台系统的载物台。根据本发明，提供了多个空气轴承装置。每个空气轴承装置包括：空气轴承本体，所述空气轴承本体具有自由表面；主通道，所述主通道延伸穿过所述空气轴承本体并且具有在所述自由表面中的入口开口；辅通道系统，所述辅通道系统延伸穿过所述空气轴承本体并且具有在所述自由表面中的多个排放开口。所述辅通道系统中的流阻高于所述主通道中的流阻。