Handover device, semiconductor equipment, semiconductor production line and handover method

• Main Authors: WANG GANG, DONG HONGBO, LIU KAI
• Format: Patent
• Language: Chinese; English
• Published: 18.12.2020
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention relates to the technical field of integrated circuit equipment manufacturing, and particularly relates to a handover device, semiconductor equipment, a semiconductor production line anda handover method. The handover device provided by the invention comprises a body and a sheet fork. The body can drive the sheet fork to move, and the sheet fork can rotate relative to the body. And if a to-be-treated surface is placed downwards, the to-be-treated surface can be placed on a to-be-placed station upwards through rotation of the sheet fork. The semiconductor equipment and the semiconductor production line do not need to be additionally provided with an overturning device so that devices in the semiconductor equipment or the semiconductor production line are fewer, a space is saved, and operation is simple. According to the handover method, the sheet fork is rotated to one side of the to-be-treated surface, the sheet fork is adsorbed to the to-be-treated surface, the body drives the sheet fork to move