Micro thermal array based on heterogeneous driving unit and preparation method thereof

• Main Authors: WANG XINGHUA, RAN DECHAO, FAN GUANGTENG, QIN JIANGYI, CAO LU, TUO ZHOUHUI
• Format: Patent
• Language: Chinese; English
• Published: 20.10.2020
• Subjects: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; TRANSPORTING

The invention discloses a micro thermal array based on a heterogeneous driving unit and a preparation method thereof. The micro thermal array based on the heterogeneous driving unit comprises a substrate, a plurality of micro-actuators arranged in an array mode are arranged on the substrate, each micro-actuator comprises a thin-film resistance heater and a heat conduction silicon column which arearranged on the surface of the substrate, a polymer driving structure layer is arranged on the surface of each thin-film resistance heater, and each heat conduction silicon column is embedded in the corresponding polymer driving structure layer. According to the invention, the internal thermal field distribution uniformity and transmission speed can be improved, the thermal driving efficiency is effectively improved, the uniformity of temperature field distribution in the polymer can be remarkably improved, the advantage of large thermal expansion coefficient of the polymer is fully played, the driving efficiency is i