Evaporation device and evaporation equipment

• Main Authors: NIU JINGHUA, YAO XIANG, DING MAN, LIU YUHAO, DAI MINGZHI
• Format: Patent
• Language: Chinese; English
• Published: 17.04.2020
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention provides an evaporation device and evaporation equipment. The evaporation device comprises an evaporation container and an anti-blocking cap which are connected or separated from each other; the anti-blocking cap comprises a first outlet, a first side wall, a first blade, a first opening, a second blade, a second opening and heating wires; the first side wall surrounds the first outlet; the first blade and the second blade are positioned in the first outlet and are fixed on the first side wall; the first blade surrounds the first opening; the second blade surrounds the second opening; the second opening is smaller than the first opening; the heating wires are arranged in the first side wall, the first blade and the second blade. The anti-blocking cap avoids instant large fluctuation of evaporation gas caused by melting, boiling or collapsing of evaporation raw materials in an evaporation container, and the emitting speed of the evaporation gas on the anti-blocking cap isstable. Therefore, the ev