HIGH THROUGHPUT, HIGH RESOLUTION OPTICAL METROLOGY FOR REFLECTIVE AND TRANSMISSIVE NANOPHOTONIC DEVICES
The present disclosure relates to optical metrology for nanophotonic devices. A metrology system according to this disclosure includes a sample camera and a reference camera each connected to at leastone computer configured with a computer processor and computerized memory. A tunable light source is...
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Main Authors | , , |
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Format | Patent |
Language | Chinese English |
Published |
16.08.2019
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Subjects | |
Online Access | Get full text |
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