EDGE RING CENTERING METHOD USING RING DYNAMIC ALIGNMENT DATA

• Main Authors: GENETTI DAMON TYRONE, YAN HAOQUAN, ESTOQUE MARC, MCCHESNEY JON, PATERSON ALEXANDER MILLER, TAN ALI SUCIPTO
• Format: Patent
• Language: Chinese; English
• Published: 05.07.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A system for determining an alignment of an edge ring on a substrate support includes a robot control module configured to control a robot to place the edge ring onto the substrate support and retrieve the edge ring from the substrate support. An alignment module is configured to determine a plurali...