EDGE RING CENTERING METHOD USING RING DYNAMIC ALIGNMENT DATA

• Main Authors: GENETTI DAMON TYRONE, YAN HAOQUAN, ESTOQUE MARC, MCCHESNEY JON, PATERSON ALEXANDER MILLER, TAN ALI SUCIPTO
• Format: Patent
• Language: Chinese; English
• Published: 05.07.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A system for determining an alignment of an edge ring on a substrate support includes a robot control module configured to control a robot to place the edge ring onto the substrate support and retrieve the edge ring from the substrate support. An alignment module is configured to determine a plurality of first positions of the edge ring on the robot prior to being placed onto the substrate supportand determine a plurality of second positions of the edge ring on the robot subsequent to being retrieved from the substrate support. An edge ring position module configured to determine a centered position of the edge ring relative to the substrate support based on offsets between the plurality of first positions and the plurality of second positions. 一种用于确定边缘环在衬底支撑件上的对准的系统包括：机械手控制模块，其被配置为控制机械手以将所述边缘环放置在所述衬底支撑件上以及从所述衬底支撑件取回所述边缘环。对准模块被配置为确定所述边缘环在被放置到所述衬底支撑件上之前在所述机械手上的多个第一位置，以及确定所述边缘环在从所述衬底支撑件取回之后在所述机械手上的多个第二位置。边缘环位置模块被配置为基于所述多个第一位置和所述多个第二位置之间的偏移来确定所述边缘环相对于所述衬底支撑件的居中位置。