A multi-frequency electrostatic excitation calibration device and a working method thereof
The invention discloses a multi-frequency point electrostatic excitation calibration device and a working method thereof. The apparatus comprises control means, D/A converter, power amplifier, Boost module, divider resistor network, A/D convert and electrostatic excitation protective cover, the elec...
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Main Author | |
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Format | Patent |
Language | Chinese English |
Published |
11.12.2018
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Subjects | |
Online Access | Get full text |
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