A multi-frequency electrostatic excitation calibration device and a working method thereof

The invention discloses a multi-frequency point electrostatic excitation calibration device and a working method thereof. The apparatus comprises control means, D/A converter, power amplifier, Boost module, divider resistor network, A/D convert and electrostatic excitation protective cover, the elec...

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Bibliographic Details
Main Author YAN MINFENG
Format Patent
LanguageChinese
English
Published 11.12.2018
Subjects
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