Protection Schemes For MEMS Switch Devices

• Main Authors: SRIVATSAN PARTHASARATHY, PADRAIG LIAM FITZGERALD, JAVIER A. SALCEDO
• Format: Patent
• Language: Chinese; English
• Published: 27.03.2018
• Subjects: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; TRANSPORTING

The invention relates to protection schemes for MEMS switch devices. Micro-electromechanical switch (MEMS) devices can be fabricated using integrated circuit fabrication techniques and materials. Suchswitch devices can provide cycle life and insertion loss performance suiting for use in a broad rang...