一种悬臂梁与光声池双共振增强型光声光谱检测系统及方法

• Format: Patent
• Language: Chinese
• Published: 14.08.2020
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

一种悬臂梁与光声池双共振增强型光声光谱检测系统及方法，属于微量气体检测技术领域。光源激发待测气体分子产生的声波在共振式光声池中的声共振管内相干叠加后有效增强光声信号幅度；同时通过对悬臂梁结构的精密设计以及温度控制对光声池共振频率的微调，使悬臂梁共振频率与光声池的共振频率实现精确匹配，利用悬臂梁的一阶共振进一步增强光声信号；双共振增强光声光谱方法结合锁相放大器实现超高灵敏度气体检测。本发明中悬臂梁与光声池的双共振增强机制使光声信号得到显著放大，且该系统工作频率在kHz量级，极大地降低了1/f噪声，为超低浓度气体检测提供一种极具竞争力的技术方案。 The invention discloses a cantilever beam and photoacoustic cell double-resonance enhanced-type photoacoustic spectrum detection system and a method, and belongs to the technical field of trace gas detection. According to the cantilever beam and photoacoustic cell double-resonance enhanced-type photoacoustic spectrum detection system and the method, sound wave generated by excitation of gas molecules with a light source is subjected to coherence stack in an acoustic resonance tube of a resonant photoacoustic cell, so that photoacoubtic signal amplitude is increased effectively; at the same time, fine adjustment on the photoacoustic cell resonant frequency is realized through precise design and temperature control of a cantilever beam struc