Small volume, long pathlength multi-pass gas cell for IR and UV monitoring

• Main Authors: COATES JOHN P, BAUM THOMAS H, WRIGHT JR ROBERT L
• Format: Patent
• Language: Chinese; English
• Published: 13.10.2017
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

A multipass cell assembly for monitoring of fluid is described, as well as fluid processing systems utilizing same, and associated methods of use of such multipass cell assembly for fluid monitoring. The multipass cell assembly is usefully employed in fluid processing operations such as monitoring of vapor deposition process reactants, e.g., reactants used for vapor deposition metallization of tungsten from a tungsten carbonyl precursor. 本发明描述种用于监测流体的多程池组合件，以及利用所述多程池组合件的流体处理系统及使用此多程池组合件来进行流体监测的相关联方法。所述多程池组合件通常用于例如监测气相沉积工艺反应物等流体处理操作中，所述气相沉积工艺反应物例如用于从羰基钨前驱物进行钨的气相沉积金属化的反应物。