Sputtering thin film temperature-pressure composite sensor and manufacturing method thereof

• Main Authors: TIAN ZHONGTAO, CHANG WENBO, ZUO XIAOJUN
• Format: Patent
• Language: Chinese; English
• Published: 22.03.2017
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; MEASURING QUANTITY OF HEAT; MEASURING TEMPERATURE; PHYSICS; TESTING; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR

The invention discloses a sputtering thin film temperature-pressure composite sensor and a manufacturing method thereof, which can measure temperature and pressure of a high-low-temperature gaseous or liquid medium. The sputtering thin film temperature-pressure composite sensor comprises a joint, a sensitive element, copper columns, a compensating plate, gold lead wires, sleeves, a signal processing circuit board, an outer shell, lead wires, fastening screws, an aviation socket and a socket base, wherein four thin-film resistors used for measuring pressure are processed on the sensitive element by adopting a sputtering thin film technology, and two thin-film resistors used for measuring temperature are further processed in a tiny deformation region on the periphery of the pressure-measuring thin-film resistors; the four pressure-measuring thin-film resistors are connected with the compensating plate in a switch-over manner and are bridged by means of the gold lead wires, the two temperature-measuring thin-fil