WEAR DETECTION OF CONSUMABLE PART IN SEMICONDUCTOR MANUFACTURING EQUIPMENT

• Main Author: BRETT C. RICHARDSON
• Format: Patent
• Language: Chinese; English
• Published: 01.03.2017
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

Methods, systems, and computer programs are presented for determining wear of a consumable part in a semiconductor processing apparatus. One chamber includes a reference part, a consumable part, a transfer arm for transferring the substrate into the chamber, a sensor on the transfer arm, and a controller. The reference part is not subject to wear during operation of the chamber, while the consumable part is subject to wear. The sensor is configured to measure a first distance from the sensor to a surface of the consumable part as the transfer arm travels near the consumable part, and the sensor is configured to measure a second distance from the sensor to a surface of the reference part as the transfer arm travels near the reference part. The controller determines the wear amount of the consumable part based on the first distance and the second distance. 本发明涉及半导体制造设备中的消耗部件的磨损检测。方法、系统和计算机程序被提出以用于确定半导体处理装置中的消耗部件的磨损。种室包括：基准部件、消耗部件、用于传送衬底到所述室内的传送臂、在所述传送臂上的传感器和控制器。所述基准部件在所述室的操作过程中不经受磨损，而所述消耗部件在所述室的操作过程中经受磨损。所述传感器被