Wavelength conversion member, light emitting device, projector, and method of manufacturing wavelength conversion member

• Main Authors: ATSUSHI MOTOYA, MITSURU NITTA, YOSHIHISA NAGASAKI, SACHIKO AZUMA, TAKAHIRO HAMADA, KENTA WATANABE, KAZUHIRO MATSUO, TOSHIO MORI, TAKASHI MANIWA, RAN ZHENG
• Format: Patent
• Language: Chinese; English
• Published: 23.03.2016
• Subjects: ACCESSORIES THEREFOR; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES; APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM; BLASTING; CHEMICAL SURFACE TREATMENT; CHEMISTRY; CINEMATOGRAPHY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTROGRAPHY; FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMSTHEREOF; HEATING; HOLOGRAPHY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; LIGHTING; MECHANICAL ENGINEERING; METALLURGY; PHOTOGRAPHY; PHYSICS; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHERARTICLES, NOT OTHERWISE PROVIDED FOR; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; WEAPONS

The present invention provides a wavelength conversion member, a light emitting device, a projector, and a method of manufacturing the wavelength conversion member. The wavelength conversion member includes a substrate, a dichroic mirror layer arranged on the substrate and reflecting at least part of light incident from above, an SiO2 layer arranged on the dichroic mirror layer, a ZnO layer arranged on the SiO2 layer, and a phosphor layer which is arranged on the ZnO layer and includes a plurality of phosphors, wherein the ZnO is arranged between the phosphors in the phosphor layer.