Vacuum turnover device and turnover method

• Main Authors: ZHAO GUANCHAO, GUO TIE, WANG ZHIJIAN, ZHAO XIN, YANG RONG
• Format: Patent
• Language: Chinese; English
• Published: 02.03.2016
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention relates to the technical field of solar cells, and discloses a vacuum turnover device and a turnover method, which are used for improving the processing efficiency of a silicon wafer for the solar cell, avoiding pollution in the turnover process of the silicon wafer and improving the production efficiency and quality of the solar cell. The vacuum turnover device comprises a vacuum turnover chamber, a transfer arm, a turnover unit and a lifting unit, wherein the transfer arm is used for transferring the silicon wafer; the turnover unit is used for picking up the silicon wafer transferred by the transfer arm and driving the silicon wafer to turn over; and the lifting unit is located below the turnover unit, and is used for lifting the silicon wafer on the transfer arm, so as to make the turnover unit pick up the silicon wafer. When the vacuum turnover device is used, the transfer arm feeds the silicon wafer into the vacuum turnover chamber; the lifting unit lifts the silicon wafer on the transfer