Heavy-calibre cryopump for pumping away xenon

• Main Authors: YANG JIANBIN, YAN CHANGLIN, LIU YUKUI, BAI SHU
• Format: Patent
• Language: English
• Published: 11.11.2015
• Subjects: BLASTING; HEATING; LIGHTING; MECHANICAL ENGINEERING; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS; WEAPONS

The invention discloses a heavy-calibre cryopump for pumping away xenon. By means of the cryopump, the xenon can be pumped away at the high pumping speed, and the device is sputtering-resistant and free of oil vapor pollution. The cryopump comprises a cryo refrigerator, an absorption array, a thermal shroud, a radiation protection screen, a pump casing, a baffle, a baffle temperature measurer, an absorption array temperature measurer and a first-grade cold shield, wherein the absorption array is composed of multiple oblong shells, the upper surface and the lower surface of each oblong shell are open, and fins are arranged on the side faces of each oblong shell; the baffle is fixedly installed on the thermal shroud at a cryopump opening, the baffle is of a plate-shaped structure, the primary optical shielding is achieved for the absorption array in the perpendicular direction of the baffle, and a graphite coating is sprayed on the surface of the baffle. The cryopump is capable of pumping away the xenon at the pumping speed which is one and a half times of that of a common cryopump, no pollution is caused, the sputtering resistance is achieved, the cryopump is applicable to an severe environment of high temperature plasma, and liquid nitrogen or mechanical refrigerant can be adopted for refrigeration so that the cost can be lowered.