Method for producing a dielectric and/or barrier layer or multilayer on a substrate, and device for implementing said method

• Main Authors: YUBERO VALENCIA FRANCISCO, RODRIGUEZ GONZALEZ-ELIPE AGUSTIN, SANCHEZ CORTEZON EMILIO, ESPINOS MANZORRO JUAN PEDRO, DELGADO SANCHEZ JOSE MARIA, GIL ROSTRA JORGE, RICO GAVIRA VICTOR
• Format: Patent
• Language: English
• Published: 30.09.2015
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention relates to a method for producing dielectric and/or barrier layers on a substrate, characterized in that it comprises the following steps: (a) cleaning substrates, (b) placing the substrate in a sample carrier and introducing same into a vacuum chamber, (c) dosing an inert gas and a re...