Microprobe and manufacturing method thereof

• Main Authors: HE SHILONG, SHEN WENJIANG, GUO SHUAI
• Format: Patent
• Language: English
• Published: 23.09.2015
• Subjects: MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PHYSICS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; TESTING; TRANSPORTING

The invention provides a microprobe which comprises a body supporting part and a testing probe. The testing probe comprises a testing cantilever beam. The microprobe further comprises a side wing which is fixedly connected with body supporting part. The testing cantilever beam and the side wing are in an integral structure. The microprobe can test the dimension precision of the cantilever beam and a pressure monitoring cantilever beam through the side wing which is fixedly connected with the body supporting part, thereby ensuring elasticity index uniformity of the testing cantilever beam and the pressure monitoring cantilever beam of the microprobe. Furthermore, a pressure monitoring probe can be used for monitoring contact between the testing probe and a tested sample, thereby preventing a testing failure caused by defects such as projection, small hole and stain on the tested sample.