Evaporation deposition equipment with self-cleaning observation window

• Main Authors: CHEN GUANBI, CHEN JUNJIAN, LI SHENG, HUANG SHIREN, QIU WENDING, REN CHANGBAO, ZENG ZHAOLONG, LIAO KEFENG
• Format: Patent
• Language: Chinese; English
• Published: 20.08.2014
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention discloses evaporation deposition equipment with a self-cleaning observation window. Evaporation deposition equipment mainly comprises a chamber, wherein the chamber is provided with an observation window, a transparent observation window plate is mounted in a position directly facing the observation window, and meanwhile, a heater which is used for heating the transparent observation window plate to the temperature higher than the melting point of an evaporation deposition source is arranged on the transparent observation window plate. Thus, heated evaporation deposition source gas can be prevented from depositing on the internal surface of the transparent observation window plate, and then, operating personnel can observe the situations inside the chamber through the transparent observation window plate.