Big stroke micro nanoscale linear actuator based on parasitic motion principle

• Main Authors: HUANG HU, YANG ZHAOJUN, SHI CHENGLI, ZHAO HONGWEI, WAN SHUNGUANG, FAN ZUNQIANG
• Format: Patent
• Language: Chinese; English
• Published: 22.08.2012
• Subjects: CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION

The invention relates to a big stroke micro nanoscale linear actuator based on the parasitic motion principle, which can be used for realizing big stroke micro nanoscale high-precision linear positioning in the areas of precise and ultra-precise processing, micro gripping operations and scanning and imaging. The big stroke micro nanoscale linear actuator mainly comprises a forward driving unit, a rotor unit and a backward driving unit. The forward driving unit and the backward driving unit are symmetrically installed on a pedestal and the rotor unit is installed in a groove on the pedestal. The foliated structures at two sides of the rotor of the rotor unit are connected with the output ends of the forward driving unit and the backward driving unit through clearance fit. The actuator is compact in structure and convenient and fast to control. Based on the parasitic motion principle, the big stroke micro nanoscale linear actuator can realize the millimeter-sized big stroke and micro nanoscale high-precision li