Device for purifying polysilicon by shell melting method, and method

• Main Authors: HE XUEMEI, ZHAN ZONGGUI, LI DUOJIA, CHEN QINGHAN, GAO SHANGJIU, XU JIAYUE, ZHANG DAOBIAO
• Format: Patent
• Language: Chinese; English
• Published: 11.05.2011
• Subjects: CHEMISTRY; COMPOUNDS THEREOF; INORGANIC CHEMISTRY; METALLURGY; NON-METALLIC ELEMENTS

The invention discloses a device for purifying polysilicon by adopting shell melting technology, which comprises a water cooling vacuum hearth, annularly arranged water cooling copper pipes, a water cooling base plate with a lifting device, a plasma torch, a feeder and ultrahigh frequency induction...