Semiconductor testing apparatus with concentric probe seats

• Main Author: CHEN FENGJIE
• Format: Patent
• Language: Chinese; English
• Published: 08.08.2012
• Subjects: MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

The invention relates to a semiconductor testing apparatus with concentric probe seats, which comprises a base, a measuring head, an external ring probe seat and an internal ring probe seat, wherein the internal ring probe seat is firstly sheathed on the internal ring surface of the external ring pr...