Semiconductor testing apparatus with concentric probe seats

• Main Author: CHEN FENGJIE
• Format: Patent
• Language: Chinese; English
• Published: 08.08.2012
• Subjects: MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

The invention relates to a semiconductor testing apparatus with concentric probe seats, which comprises a base, a measuring head, an external ring probe seat and an internal ring probe seat, wherein the internal ring probe seat is firstly sheathed on the internal ring surface of the external ring probe seat, the clamping groove of the internal ring probe seat is correspondingly connected to a radial convex column of the external ring probe seat, the external ring probe seat and the internal ring probe seat are arranged on a testing carrier plate of the measuring head, and a plurality of external ring probes of the external ring probe seat and a plurality of internal ring probes of the internal ring probe seat are respectively electrically connected with the testing carrier plate. Therefore, the internal ring probe seat and the external ring probe seat are combined or separated to achieve the effect of testing expansion, thus, two probe cards with different specifications can be selected for testing, and the g