Method for coating surface of radiation module and coated radiation module

• Main Author: LIN YUXUE
• Format: Patent
• Language: Chinese; English
• Published: 16.06.2010
• Subjects: CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS; METALLURGY; PRINTED CIRCUITS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention discloses a method for coating a surface of a radiation module. The method comprises the following steps of: providing a radiation module; cleaning the surface of the radiation module; putting the radiation module in a working environment, introducing hydrogen gas and tetramethylsilane gas into the working environment, applying an external power to generate a bias electric field in the working environment, so an adhered film is formed on the surface of the radiation module; forming a complex film on the surface of the adhered film; and forming a carbon film with a non-crystal structure on the surface of the complex film, thereby, a coated radiation module is manufactured. In the complex film, the position is farther away from the radiation module, the content of the carbon material with the non-crystal structure is higher.