Amorphous ge/te deposition process
The present invention relates to that germanium, tellurium, and/or antimony precursors are usefully employed to form germanium-, tellurium- and/or antimony-containing films, such as films of GeTe, GST, and thermoelectric germanium-containing films. Processes for using these precursors to form amorph...
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Main Authors | , , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
07.11.2012
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Subjects | |
Online Access | Get full text |
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Summary: | The present invention relates to that germanium, tellurium, and/or antimony precursors are usefully employed to form germanium-, tellurium- and/or antimony-containing films, such as films of GeTe, GST, and thermoelectric germanium-containing films. Processes for using these precursors to form amorphous films are also described. Further described is the use of [{nBuC(iPrN) 2 } 2 Ge] or Ge butyl amidinate to form GeTe smooth amorphous films for phase change memory applications. |
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Bibliography: | Application Number: CN200810174324 |