Gas supply integration unit

A gas supply integration unit enabling the easy extension of lines, comprising a plurality of gas units. Each gas unit is formed by integrally connecting, in series, a first manual valve (11) installed in an outlet flow passage, a second manual valve (13) installed at a position where the first manu...

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Bibliographic Details
Main Author KAWAKUBO OSAMU,TAKEICHI AKIHIRO,INOUE TAKASHI,MIWA TOSHIKAZU
Format Patent
LanguageEnglish
Published 14.11.2007
Subjects
BASIC ELECTRIC ELEMENTS
BLASTING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED,LIQUEFIED, OR SOLIDIFIED GASES
FIXED-CAPACITY GAS-HOLDERS
HEATING
LIGHTING
MECHANICAL ENGINEERING
PIPE-LINE SYSTEMS
PIPE-LINES
SEMICONDUCTOR DEVICES
STORING OF DISTRIBUTING GASES OR LIQUIDS
VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED ORSOLIDIFIED GASES
WEAPONS
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Summary:A gas supply integration unit enabling the easy extension of lines, comprising a plurality of gas units. Each gas unit is formed by integrally connecting, in series, a first manual valve (11) installed in an outlet flow passage, a second manual valve (13) installed at a position where the first manual valve (11) is allowed to communicate with a process gas common flow passage (15), a third manual valve (14) installed at a position where the first manual valve (11) is allowed to communicate with a purge gas common flow passage (16) to each other through a flow passage block. The unit also comprises a process gas common flow passage end part manual valve (22) communicating with the end part of the process gas common flow passage (15) and a purge gas common flow passage end part manual valve (23) communicating with the end part of the purge gas common flow passage (16).
Bibliography:Application Number: CN200580006774