Method for suppressing plasma unstable
The method comprises: adding the electropositive plasma gas into the raw material gas which contains the electronegative plasma gas and is provided for the plasma generator to make the electronic density of the plasma generated in the plasma generator increased; wherein, the addition of electroposit...
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Format | Patent |
Language | English |
Published |
10.10.2007
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Abstract | The method comprises: adding the electropositive plasma gas into the raw material gas which contains the electronegative plasma gas and is provided for the plasma generator to make the electronic density of the plasma generated in the plasma generator increased; wherein, the addition of electropositive plasma gas makes the generated plasma stable. |
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AbstractList | The method comprises: adding the electropositive plasma gas into the raw material gas which contains the electronegative plasma gas and is provided for the plasma generator to make the electronic density of the plasma generated in the plasma generator increased; wherein, the addition of electropositive plasma gas makes the generated plasma stable. |
Author | HANMING,GAO WU |
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RelatedCompanies | ZHONGXIN INT IC MANUFACTURE (SHANGHAI) CO., LTD |
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Snippet | The method comprises: adding the electropositive plasma gas into the raw material gas which contains the electronegative plasma gas and is provided for the... |
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SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SEMICONDUCTOR DEVICES |
Title | Method for suppressing plasma unstable |
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