Servo system for a two-dimensional micro-electromechanical system (MEMS)-based scanner and method therefor

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Bibliographic Details
Main Authors POZIDIS CHARALAMPOS, SHARMA ARUN, DANG HIEN
Format Patent
LanguageChinese
English
Published 18.11.2009
Subjects
CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
INFORMATION STORAGE
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
Online AccessGet full text

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Author DANG HIEN
SHARMA ARUN
POZIDIS CHARALAMPOS
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SubjectTerms CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
INFORMATION STORAGE
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
Title Servo system for a two-dimensional micro-electromechanical system (MEMS)-based scanner and method therefor
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