TESTING DEVICE

• Main Authors: KUUKKALA, ARI, JUNES, AKI, SALMINEN, TIMO, HENTTONEN, VESA, MANNINEN, MATTI, ROSCHIER, LEIF, GUNNARSSON, DAVID
• Format: Patent
• Language: English; French
• Published: 03.11.2020
• Subjects: MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

The present invention provides a testing device (100) for electrically testing integrated circuits on a wafer (102). The testing device (100) comprises a vacuum chamber (109), a chuck (101) for holding the wafer (102), a probe card (103) for electrically contacting the integrated circuits, and a rad...