HIGH SPEED SCANNING SYSTEM WITH ACCELERATION TRACKING
Disclosed herein is a high throughput optical scanning device and methods of use. The optical scanning device and methods of use provided herein can allow high throughput scanning of a continuously moving object with a high resolution despite fluctuations in stage velocity. This can aid in high thro...
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Main Authors | , , , , , |
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Format | Patent |
Language | English French |
Published |
07.09.2018
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Subjects | |
Online Access | Get full text |
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